JPS5227367Y1 - - Google Patents
Info
- Publication number
- JPS5227367Y1 JPS5227367Y1 JP13397175U JP13397175U JPS5227367Y1 JP S5227367 Y1 JPS5227367 Y1 JP S5227367Y1 JP 13397175 U JP13397175 U JP 13397175U JP 13397175 U JP13397175 U JP 13397175U JP S5227367 Y1 JPS5227367 Y1 JP S5227367Y1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13397175U JPS5227367Y1 (en]) | 1975-09-30 | 1975-09-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13397175U JPS5227367Y1 (en]) | 1975-09-30 | 1975-09-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5227367Y1 true JPS5227367Y1 (en]) | 1977-06-22 |
Family
ID=33088103
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13397175U Expired JPS5227367Y1 (en]) | 1975-09-30 | 1975-09-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5227367Y1 (en]) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56593A (en) * | 1979-06-11 | 1981-01-07 | Leybold Heraeus Verwaltung | Rotor of turbomolecule pump and its manufacture |
| JP2019035344A (ja) * | 2017-08-10 | 2019-03-07 | 株式会社島津製作所 | ポンプロータおよびターボ分子ポンプ |
| JP2019065857A (ja) * | 2017-10-02 | 2019-04-25 | プファイファー・ヴァキューム・ゲーエムベーハー | ターボ分子真空ポンプ |
-
1975
- 1975-09-30 JP JP13397175U patent/JPS5227367Y1/ja not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56593A (en) * | 1979-06-11 | 1981-01-07 | Leybold Heraeus Verwaltung | Rotor of turbomolecule pump and its manufacture |
| JP2019035344A (ja) * | 2017-08-10 | 2019-03-07 | 株式会社島津製作所 | ポンプロータおよびターボ分子ポンプ |
| JP2019065857A (ja) * | 2017-10-02 | 2019-04-25 | プファイファー・ヴァキューム・ゲーエムベーハー | ターボ分子真空ポンプ |